| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe control apparatus that can be applied to a sample where an insulating region and a high electric resistance region are mixed, does not use laser beams for decreasing an S/N ratio when measuring weak emission by a tunnel current, can use a probe suited for use as a conductive focusing probe, and can apply voltage between the tip of the probe and the sample. SOLUTION: In the probe control apparatus, a gap 4 is controlled by controlling a rod-like probe 1 that is vertical to the surface of a sample 3, a vibrator 7 for vibration for vibrating the probe 1 in a direction that orthogonally crosses a center axis, a vibrator 10 for sensing that detects the amplitude of the probe 1, and the amplitude of the probe 1 to a specific amplitude. In the probe control apparatus, the probe 1 has a light transmission property and conductivity, a probe bias power supply 14 for applying a voltage between the tip of the probe 1 and the sample 3 is provided, and the area between the vibrator 10 for sensing and the probe 1 is electrically insulated by an insulating material 81.
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