| 摘要 |
PROBLEM TO BE SOLVED: To provide a pump member provided with both corrosion resistance and high radiation rate and a turbo molecular pump with this pump member applied as a rotor and to provide a surface finished layer which can generally give the above performances to optional members. SOLUTION: On the surface of the rotor which is a component of the turbo molecular pump, the surface finished layer S is formed. This surface finished layer S is made of a first layer which is a metal plated layer S1 made of Ni-P alloy formed by electroless plating and a second layer which is a resin layer S2 formed by electropainting a fluorocarbon resin. An intermediate layer SM made of amorphous organic metal coating is provided between the metal plated layer S1 and the resin layer S2. By this constitution, corrosion resistance is improved by the metal plated layer S1 and the resin layer S2, and heat radiation by the resin layer S2, respectively.
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