AN APPARATUS AND A METHOD FOR FORMING A PATTERN USING A CRYSTAL STRUCTURE OF MATERIAL,申请号EP20020716485-传众专利搜索

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发明名称	AN APPARATUS AND A METHOD FOR FORMING A PATTERN USING A CRYSTAL STRUCTURE OF MATERIAL
摘要
申请公布号	EP1287549(A1)	申请公布日期	2003.03.05
申请号	EP20020716485	申请日期	2002.01.24
申请人	KIM, KI-BUM	发明人	KIM KI-BUM
分类号	G03F7/20;H01L21/26;A61N5/00;B82B3/00;G03C5/00;G21G5/00;H01J27/00;H01J37/317;H01L21/00;H01L21/027;H01L21/324;H01L21/335;H01L21/336;H01L21/42;H01L21/477;H01L21/8232;H01L29/06;H01L29/78;H01L29/788;(IPC1-7):H01L21/26	主分类号	G03F7/20
代理机构		代理人
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