| 摘要 |
PROBLEM TO BE SOLVED: To provide a method using variable inductance of a high-frequency air-core coil spring with a simple structure, detecting displacement based of the variable inductance of the coil spring, and being improved in properties by linearizing the detection characteristic, and to provide a displacement sensor in which a displacement forming section of the coil spring and a displacement measuring section are integrally formed. SOLUTION: The displacement sensor is composed of the air-core coil spring, a linearity compensating element 36 in which a series resistor r is arranged to a parallel capacitance circuit including variable impedance 9 of the air-core coil spring and a parallel capacitor C of 0.06μF, a high-frequency constant current source 17 supplying high-frequency constant current to the circuit, and an output section 16. The output characteristic of the displacement sensor is compensated approximately linearly for the displacement by the linearity compensating circuit forming the linearity compensating element 36.
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