发明名称 PACKAGE FOR PRESSURE DETECTION DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a small-sized and highly-sensitive pressure detection device capable of detecting the outside pressure accurately over a long period. SOLUTION: This package for the pressure detection device comprises a ceramic substrate 1 having plural metallized wiring conductors 6, and having a loading part 1b of a semiconductor element 4 on one main surface and a first metallized electrode 8 for capacitance formation connected electrically to the metallized wiring conductors 6 on the other main surface, a ceramic board 2 jointed to the ceramic substrate 1 in the flexible state so as to form an enclosed space S between itself and the other main surface of the ceramic substrate 1, and having a second metallized electrode 10 facing to the first metallized electrode 8 on its inside main surface, and a protection board 3 disposed so as to have a gap G between the outside main surface of the ceramic board 2 and the outside main surface thereof, and having a through hole 3a penetrating from the outside to the gap G.
申请公布号 JP2003065869(A) 申请公布日期 2003.03.05
申请号 JP20010258369 申请日期 2001.08.28
申请人 KYOCERA CORP 发明人 KINOMURA KOJI
分类号 G01L13/06;(IPC1-7):G01L13/06 主分类号 G01L13/06
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