发明名称 |
Power MOSFET transistor and Schottky diode |
摘要 |
A power MOSFET transistor (2) and a Schottky diode (5) having a low resistance and a high breakdown voltage are provided. When the bottom portion of a narrow trench (20,53) having the shape of a rectangular parallelepiped is filled with a semiconductor (22,57) grown by epitaxial method, a {1 0 0} plane is exposed at the sidewalls of the narrow trench. The semiconductor is epitaxially grown at a constant rate on each sidewall of the narrow trench; thereby, creating a filling material with no voids present therein. The concentration and width of the filling material are optimized. This allows the portion located between the filling materials in a drift layer (12,52) to be completely depleted when the filling material is completely depleted; thereby, making it possible to establish an electric field having a constant strength in the depletion layer extending in the drift layer. |
申请公布号 |
EP1289022(A2) |
申请公布日期 |
2003.03.05 |
申请号 |
EP20020016509 |
申请日期 |
2002.07.23 |
申请人 |
SHINDENGEN ELECTRIC MANUFACTURING COMPANY, LIMITED |
发明人 |
KITADA, MIZUE;OSHIMA, KOSUKE;KUROSAKI, TORU;KUNORI, SHINJI;SUGAI, AKIHIKO |
分类号 |
H01L29/78;H01L21/329;H01L21/331;H01L21/336;H01L29/04;H01L29/06;H01L29/12;H01L29/47;H01L29/739;H01L29/861;H01L29/872 |
主分类号 |
H01L29/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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