| 摘要 |
PROBLEM TO BE SOLVED: To provide a testing device sensor capable of precisely testing the shape of a conductor pattern and a testing device using this sensor. SOLUTION: A sensor element 12a comprises MOSFET, and an aluminum electrode (AL) is arranged as a passive element 80. The aluminum electrode 80 as the passive element 80 is connected to the gate of MOSFET 81 and the source of MOSFET 82. A voltage VDD is applied to the drain of MOSFET 81 from a power supply circuit part 18, and the source of MOSFET 81 is connected to the drain of MOSFET 83. A reset signal from a vertical selection part 14 is inputted to the gate of MOSFET 83, and the voltage VDD from the power supply circuit 18 is applied to the drain of MOSFET 83. A selection signal from the vertical selection part 14 is inputted to the gate of MOSFET 83, and the output from the source of MOSFET 83 is inputted to a lateral selection part 13.
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