发明名称 DEPOSITED FILM FORMING METHOD AND MASK USED FOR THE SAME, AND ORGANIC LUMINESCENCE DISPLAY PANEL
摘要 PROBLEM TO BE SOLVED: To provide a deposited film forming method by which the deposited film having a prescribed shape is formed easily with a simple process, and a mask used for the same. SOLUTION: In the method for forming the deposited film on a selected place of a substrate or a laminated structure formed on the substrate by arranging the mask having an opening part, the whole opposite surface of the mask to the substrate or the laminated structure is prevented from being in contact with the substrate or the laminated structure by providing leg parts each projected from an arbitrary part of the real part except the opening part in the nearly vertical direction on the opposite surface of the mask to the substrate or the laminated structure.
申请公布号 JP2003064467(A) 申请公布日期 2003.03.05
申请号 JP20010248306 申请日期 2001.08.17
申请人 PIONEER ELECTRONIC CORP 发明人 ISHIZUKA SHINICHI
分类号 H05B33/10;C23C14/04;G09F9/00;G09F9/30;H01L27/32;H01L51/50;H05B33/12;H05B33/14;H05B33/22;(IPC1-7):C23C14/04 主分类号 H05B33/10
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