| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem that stabilized ejection characteristics cannot be attained when a liquid chamber is made smaller than a drive means. SOLUTION: A diaphragm member 2 comprises a thin layer diaphragm part 21, a protrusion 22 being bonded to a piezoelectric element 12, and an intermediate part 23 formed thinner than the protrusion 22 but thicker than the thin layer diaphragm part 21 at a part other than the thin layer diaphragm part 21 and the protrusion 22 facing the piezoelectric element 12.
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