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经营范围
发明名称
METHOD FOR TESTING A CAPACITIVE ACTUATOR
摘要
申请公布号
EP1287250(A1)
申请公布日期
2003.03.05
申请号
EP20010944976
申请日期
2001.06.07
申请人
SIEMENS AKTIENGESELLSCHAFT
发明人
HIRN, RAINER;KAESBAUER, MICHAEL
分类号
F02D41/20;F02D41/22;H02N2/06;(IPC1-7):F02D41/20;H01L41/04
主分类号
F02D41/20
代理机构
代理人
主权项
地址
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