| 摘要 |
PROBLEM TO BE SOLVED: To obtain a pneumatic actuator, whose shaft deflection is within severalμm and whose sliding resistance is very small, and capable of affording imparted load in some degree between tens of g and hundreds of kg, in spite of the pneumatic actuator. SOLUTION: In the pneumatic actuator, a pair of penetrating bores of round shape in section, which are parallel with each other, are formed in a housing, a pneumatic bearing metal for supporting an advance and retreat rod via pneumatic layer is inserted and secured in each of the pair of penetrating bores, moreover a piston chamber is formed in the housing, being parallel with the pair of the penetrating bores and the axis line, a piston body locating in the piston chamber without contact there is supported via a rolling diaphragm, and the pair of the advance and retreat rod and the piston body are secured in the common plate. The advance and retreat rod can be held at the center of the pneumatic bearing metal by centripetal action of the rolling diaphragm, and the actuator having a little shaft deflection and sliding resistance and capable of freely affording the impaired load with pneumatic pressure is obtained.
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