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发明名称
Secondary ion mass spectrometer with apertured mask
摘要
申请公布号
EP0884759(B1)
申请公布日期
2003.03.05
申请号
EP19980110548
申请日期
1998.06.09
申请人
ATOMIKA INSTRUMENTS GMBH
发明人
MAUL, JOHANN L., DR.
分类号
G01N23/225;G01N27/62;G01Q20/02;G01Q60/44;H01J37/02;H01J37/252;(IPC1-7):H01J37/252
主分类号
G01N23/225
代理机构
代理人
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