| 摘要 |
PROBLEM TO BE SOLVED: To contrive an performance procedure of a test and shorten test time. SOLUTION: An exchange requesting means 8 of a tester 106A outputs a semiconductor device exchange signal 14 to a handler 104A after a test performing means 128 acquires a signal from a CCD 108A and before it processes the signal. In a control means 4 of the handler 104A, when the semiconductor device exchange signal 14 is received from the tester 106A, an unloading means 114 is activated, the CCD 108A is retrieved from a tester connecting part 110, and a loading means 112 arranges a new CCD in the tester connecting part 110. A test requesting means 6 of the handler 104A sends a next test request signal 124 to the tester 106A after the loading means 112 arranges the new CCD in the tester connecting part 110. Consequently, signal processing for performance determination, retrieval of the CCD, and arrangement of the next CCD are carried out in parallel, and the test time can be shortened.
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