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发明名称
A CHEMICAL-MECHANICAL POLISHING SYSTEM FOR THE MANUFACTURE OF SEMICONDUCTOR DEVICES
摘要
申请公布号
EP1286808(A2)
申请公布日期
2003.03.05
申请号
EP20010926659
申请日期
2001.04.06
申请人
MOTOROLA, INC.
发明人
VANELL, JAMES, F.;BRAY, CHAD, B.
分类号
B01F3/08;B01F13/08;B01F15/04;B24B37/04;B24B49/10;B24B57/02;H01L21/304;(IPC1-7):B24B57/02;G01N21/41;B01F5/00
主分类号
B01F3/08
代理机构
代理人
主权项
地址
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