| 摘要 |
PROBLEM TO BE SOLVED: To allow visual confirmation for a process data over a long period, to call out a data older than a recordable period in a trend history file, and to trend-display a data in which a defect of the process data caused by a trouble and the like is corrected. SOLUTION: This trend display for the process data having a trend data displaying function for displaying a tendency of a change thereof based on a time-serial data of the process data is provided with a time-serial data preparing means 11 for preparing other time-serial data recorded as other function different from the time-serial data hereinbefore, a data conversion-processing means 14 for converting the data prepared by the time-serial data preparing means into a data format capable of conducting trend data display-processing, and a display means 10 for displaying as a trend data a data of which the format is converted by the data conversion-processing means.
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