| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for cleaning treatment for the inside of a deposited film forming equipment for producing an inexpensive electrophotographic photoreceptor of high quality. SOLUTION: A heating element in a vacuum system is set as a means for heating the inside of a reaction vessel before the start of DE (cleaning) treatment, and is heated at >=100 deg.C. After that, ClF3 whose concentration is controlled to 25 to 80% by the mixing of a dilution gas into a gaseous starting material for DE is introduced into the reaction vessel, and electric power is applied thereto from a high-frequency power source so as to be an excited state by plasma energy, and its reaction with a deposition film/or a by-product is caused. Thus, they are made into gas phase molecules, and are exhausted by an exhausting means to clean the deposited film forming equipment.
|
