Photomask ESD protection and an anti-ESD pod with such protection

摘要

An active anti-ESD pod for transporting photomask (reticle) comprises six body portions delimiting the container, an electrically conducting plate on the top portion, and an electrically conducting handle connected to the plate. An active charge sinker combined with a tag identifying the container or placed onto the photomask itself is provided to absorb the static electricity and to thus prevent charge accumulation that may otherwise cause ESD damage to the photomask.