| 摘要 |
An apparatus designed to prevent, by adjusting a flow of laser gas, discharge products from stagnating and being released again into a main discharge space, maintain the purity of the laser gas in the main discharge space, and stabilize the main discharge so as to minimize laser output fluctuation, in which conductors are interposed in the gaps between a main discharge electrode and a pair of corona preliminary ionization electrodes, from the upper surface of a support plate to the discharge starting points.
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