发明名称 Disk carrier
摘要 A first disk carrier constructed in accordance with the invention is substantially circular, and has a size and shape such that it can be placed in an opening in a second, larger disk carrier. In one embodiment, the second, large disk carrier is a conventional disk carrier, e.g. used to hold a substrate during a magnetic disk manufacturing process. The first disk carrier is circular, and has a diameter equal (or substantially equal) to common substrates currently being manufactured. Therefore, the first disk carrier fits in and can be held by the second disk carrier. The first disk carrier has one or more openings for holding one or more substrates that have a diameter substantially less than the diameter of the opening of the second disk carrier.
申请公布号 US6528124(B1) 申请公布日期 2003.03.04
申请号 US20010811120 申请日期 2001.03.17
申请人 KOMAG, INC. 发明人 NGUYEN TIN
分类号 C23C14/50;C23C14/56;G11B5/851;G11B17/22;H01L21/677;H01L21/683;(IPC1-7):B05D1/00;B05C13/00;B23Q1/25;B25B1/20;C23C14/34 主分类号 C23C14/50
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