发明名称 |
Double acting cold trap |
摘要 |
A double acting cold trap equipped with a set of exhaust gas condensing fins and a set of exhaust gas condensing plates is disclosed. The invention also discloses a double acting cold trap that incorporates a deflecting plate to direct the exhaust gases over the condensing fins and plates in a serial fashion. This increases the efficiency of the collection of unwanted particles.
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申请公布号 |
US6528420(B1) |
申请公布日期 |
2003.03.04 |
申请号 |
US20020053332 |
申请日期 |
2002.01.18 |
申请人 |
CHARTERED SEMICONDUCTOR MANUFACTURING LTD. |
发明人 |
TONG WEI HUA;YANG CHEN YU;ZHANG JIAN;QUAN QIAN WU |
分类号 |
B01D53/50;C23C16/44;H01L21/31;(IPC1-7):H01L21/44;H01L21/469 |
主分类号 |
B01D53/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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