发明名称 Double acting cold trap
摘要 A double acting cold trap equipped with a set of exhaust gas condensing fins and a set of exhaust gas condensing plates is disclosed. The invention also discloses a double acting cold trap that incorporates a deflecting plate to direct the exhaust gases over the condensing fins and plates in a serial fashion. This increases the efficiency of the collection of unwanted particles.
申请公布号 US6528420(B1) 申请公布日期 2003.03.04
申请号 US20020053332 申请日期 2002.01.18
申请人 CHARTERED SEMICONDUCTOR MANUFACTURING LTD. 发明人 TONG WEI HUA;YANG CHEN YU;ZHANG JIAN;QUAN QIAN WU
分类号 B01D53/50;C23C16/44;H01L21/31;(IPC1-7):H01L21/44;H01L21/469 主分类号 B01D53/50
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