| 摘要 |
PURPOSE: A remote plasma generator is provided, which is stable and has high ionization efficiency. CONSTITUTION: A magnetic core(26) comprises a tube of a conductive material which is wound at least one time. An inlet(22) of the magnetic core is connected to a gas source, an outlet(23) thereof is connected to a process chamber, and both ends thereof are electrically connected to a low frequency generator(18) for providing a low frequency. Both ends of the tube consist of isolation members(24,25) so as to be electrically isolated from the gas source and the process chamber.
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