| 摘要 |
A substrate for use in an ink jet recording head is provided with a plurality of heat generating members for generating thermal energy to be utilized for discharging ink. The heat generating members are structured by a thin film formed by material represented by Tax Siy Rz, which has a specific resistance value of 4000 muOMEGA.cm or less, where R is one or more kinds of elements selected from/among C, O, N, and x+y+z=100. With the structure thus arranged, the heat generating members make it possible to maintain the change of resistance values within a small amount even when used continuously for a long time, and provide recorded images of high quality with long life and reliability.
|
