发明名称 MOSFET transistor with short channel effect compensated by the gate material
摘要 A MOSFET transistor comprising a gate made of silicon-germanium alloy, formed on a single crystal silicon substrate by means of a thin insulating layer, and drain and source regions implanted in the substrate on each side of the gate, characterized in that the gate comprises side regions presenting an increasing germanium percentage towards the sides of the gate facing the drain and source regions. Advantage: compensation of the short channel effect by locally decreasing the work function of the gate material near the drain and source regions.
申请公布号 US6528399(B1) 申请公布日期 2003.03.04
申请号 US20000606600 申请日期 2000.06.29
申请人 STMICROELECTRONICS, S.A. 发明人 ALIEU JEROME;HERNANDEZ CAROLINE;HAOND MICHEL
分类号 H01L21/28;H01L29/49;(IPC1-7):H01L21/22 主分类号 H01L21/28
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