CHAMBER HAVING INNER WALL FORMED WITH DOUBLE LAYERS

摘要

PURPOSE: A chamber having an inner wall formed with double layers is provided to restrain the generation of particles by improving the quality of an inner wall of a dry etch chamber. CONSTITUTION: An inner wall(102) of a chamber is formed with an aluminum anodizing shield ring(102A) and a special plastic layer(102B). The aluminum anodizing shield ring(102A) is formed on the outside of the inner wall(102) of an etch chamber. The special plastic layer(102B) is inserted into the inside of the aluminum anodizing shield ring(102A). The special plastic layer(102B) is formed with a fluoric resin material such as polyimide. The etch chamber is formed with a dry etch chamber such as MERIE(Magnetically Reactive Ion Etching) chamber.