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发明名称
摘要
申请公布号
JP3382461(B2)
申请公布日期
2003.03.04
申请号
JP19960179807
申请日期
1996.06.21
申请人
发明人
分类号
G02F1/13;G02F1/1343;H01L21/28;H01L21/285;(IPC1-7):G02F1/134
主分类号
G02F1/13
代理机构
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