RF PRECLEANING SYSTEM HAVING CRACK-FREE STRUCTURE OF BELL JAR

摘要

PURPOSE: An RF(Radio Frequency) precleaning having crack-free structure of a bell jar is provided to reduce a processing error due to particles by restraining the generation of the particles within a chamber. CONSTITUTION: A bell jar(20) is used for forming a chamber space to perform a precleaning process for a wafer(10) loaded on an upper portion of a support chuck(7). A chamber body(4) is used for supporting the bell jar(20). A cover ring(1) is located between an upper portion of the chamber body(4) and a lower portion of the bell jar(20) in order to perform a buffering function and a sealing function between the chamber body(4) and the bell jar(20). The cover ring(1) is formed with teflon. A plurality of O-rings(2,3) are inserted into an upper portion and a lower portion of the cover ring(1). A support chuck(7) can be formed with a ceramic electrostatic chuck.