Improved chemical mechanical polishing compositions for metal and associated materials and method of using same,申请号AU20020326636-传众专利搜索

发明名称	Improved chemical mechanical polishing compositions for metal and associated materials and method of using same
摘要
申请公布号	AU2002326636(A1)	申请公布日期	2003.03.03
申请号	AU20020326636	申请日期	2002.08.14
申请人	ADVANCED TECHNOLOGY MATERIALS, INC.	发明人	CARY REGULSKI;YING MA;DAVID BERNHARD;WILLIAM WOJTCZAK;DEEPAK VERMA;THOMAS H. BAUM
分类号	B24B37/04;C09G1/02;H01L21/321;(IPC1-7):B24B7/00	主分类号	B24B37/04
代理机构		代理人
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