SLIDE ARM OF STEPPER EQUIPMENT

摘要

PURPOSE: A slide arm of a stepper equipment is provided to prevent distortion of a wafer support plate and vacuum leakage due to the distortion of the wafer support plate by forming the slide arm with the same material without additional combining members. CONSTITUTION: A wafer supporter(21) and a vertical portion(23) are formed with the same metal member. A vertical bending part is formed by the wafer supporter(21) and the vertical portion(23). A bending phenomenon of the wafer supporter(21) is prevented by increasing the thickness of the wafer supporter(21) and the thickness of the vertical portion(23). The length of the wafer supporter(21) is longer than a radius of a wafer(10). A plurality of vacuum holes(27) are formed on an upper face of the wafer supporter(21) contacted with the wafer(10). An interval between the vacuum holes(27) is larger than half of the length of a bar.