| 摘要 |
PROBLEM TO BE SOLVED: To positively separate a semiconductor wafer from a carriage of a semiconductor wafer carrier and move the wafer onto a carrying belt. SOLUTION: The semiconductor transfer apparatus comprises a carriage (1) for vertically moving a semiconductor wafer (9) between a lower position and an upper position, a carrying belt (6) for carrying the semiconductor wafer (9), a pair of positioning members (4) for holding the semiconductor wafer (9) on the carriage (1), and a pusher (11) for pressing the semiconductor wafer (9) in a separating direction from the positioning members (4). A first protrusion (21) and a second protrusion (22) of the pusher (11) are brought into contact with the side edge of the semiconductor wafer (9) on a position near the positioning members (4), so that the semiconductor wafer (9) can be positively separated from the positioning members (4). |
