发明名称 WASHING DEVICE AND DEVELOPING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a washing device capable of reducing the use of washing liquid, and a developing device having the washing device. SOLUTION: A developing unit (DEV) 24 is equipped with a roller carrying mechanism 14 carrying a base plate G nearly in horizontal posture nearly in a horizontal direction, a 1st rinsing zone 24e and a 2nd rinsing zone 24f for performing rinsing to the base plate G carried by the mechanism 14, and rinsing nozzles 53a to 53d discharging a rinse to the base plate G carried by the mechanism 14 in the 1st and the 2nd rinsing zones 24e and 24f. A new rinse is used as the rinse only in the 2nd rinsing zone 24f positioned on the most downstream side in the carrying direction of the base plate G. In the 1st rinsing zone 24e, the rinse discharged to the base plate G at least once is recovered and used, whereby the use of the new rinse is reduced.
申请公布号 JP2003057843(A) 申请公布日期 2003.02.28
申请号 JP20010241841 申请日期 2001.08.09
申请人 TOKYO ELECTRON LTD 发明人 SADA TETSUYA
分类号 G02F1/13;G02F1/1333;G03F7/30;H01L21/027;(IPC1-7):G03F7/30;G02F1/133 主分类号 G02F1/13
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