| 摘要 |
<p>PROBLEM TO BE SOLVED: To solve the problem of a method for measuring the thickness of a film growing in a deposition system using the light from a tungsten lamp light source as a film thickness measuring light that the film thickness of a high grade film, e.g. a multilayer film, can not be measured accurately. SOLUTION: A fiber laser light source is employed as the light source of film thickness measuring light and accuracy of film thickness measurement is enhanced drastically through combination of film thickness measurements of transmission and reflection types.</p> |
