| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor substrate production system which can flexibly respond to a frequent change in specifications and also respond to a demand for a small lot of specific semiconductors. SOLUTION: The semiconductor substrate production system comprises a means for receiving the production requirements for a semiconductor substrate specified by each customer from each customer's terminal via a network, a means for making a plan to produce semiconductor substrates based on the specified production requirements, and a means for instructing each production unit to produce the semiconductor substrates according to the production plan. The production requirements include specification of the number to be produced, specification of a substrate, specification of a production unit, and specification of a recipe in each production unit. |
