THIN FILM PIEZOELECTRIC SUBSTRATE AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To form a thin film piezoelectric material of 5 micrometers or smaller on a silicon substrate or the like. SOLUTION: A thin film piezoelectric substrate with the film thickness of the piezoelectric substrate of 5 micrometer or smaller is provided. A substrate, formed by PZT in thin film excellent in piezoelectric characteristic, can be provided even on the material substrate such as silicon substrate, on which PZT thin film of satisfactory piezoelectric characteristics is hard to be formed by direct sputtering method.