发明名称 METHOD OF ELIMINATING OFF-CENTERING OF MASTER RESIST DISK AND MASTER RESIST ALIGNER
摘要 PROBLEM TO BE SOLVED: To realize a master disk aligner which can suppress vibration during rotation by eliminating the off-centering of a master resist disk, can prevent the axial deflection of a turntable and makes high-accuracy inter-track pitch obtainable with a relatively simple apparatus and by a simple process. SOLUTION: A balance adjusting weight is installed to the prescribed position of the turntable so as to minimize the vibration displacement generated when the master resist disk is rotated, by which the weight balance of the turntable is regulated in the installed state of the master resist disk.
申请公布号 JP2003059120(A) 申请公布日期 2003.02.28
申请号 JP20010240873 申请日期 2001.08.08
申请人 TOSOH CORP 发明人 FUTAMI TATSU
分类号 G11B7/26;(IPC1-7):G11B7/26 主分类号 G11B7/26
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