| 摘要 |
PROBLEM TO BE SOLVED: To protect a semiconductor wafer against damages, while automating the processing thereof by correcting an offset load existing between two cradles automatically, thereby suppressing vibration during rotation. SOLUTION: Weight of a single semiconductor wafer 31 is prestored, and an offset load produced between two cradles 16A and 16B is calculated previously from the number of inputted semiconductor wafers 31. A dummy weight 32 is moved to a position for canceling the calculated offset load.
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