| 摘要 |
PROBLEM TO BE SOLVED: To provide a holding fixture in which there is no fear of deteriorating an object to be worked and the whole of which can be used repeatedly as required in holding fixtures (2, 102, 202, 302, 402) used to hold sheetlike objects to be worked such as semiconductor wafers (8, 108, 208, 308, 408). SOLUTION: Tack members (6, 106, 206, 306, 406) constituted of rubber sheets of films comprising a tacky property are used, and the objects to be worked are held by the tacky property of the rubber sheets or the films. |
