发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 <p>PROBLEM TO BE SOLVED: To form micronized wiring structure without increasing resistance of a through hole. SOLUTION: A semiconductor device has a first wiring layer formed on the surface of a first interlayer insulating film, and a second wiring layer which is arranged above the first wiring layer and electrically connected with the first wiring layer. The first wiring layer is so constituted that width of a lower part becomes narrow as compared with that of an upper part.</p>
申请公布号 JP2003060031(A) 申请公布日期 2003.02.28
申请号 JP20010245889 申请日期 2001.08.14
申请人 OKI ELECTRIC IND CO LTD 发明人 NAKAMURA MAKIKO
分类号 H01L21/3205;H01L21/3213;H01L21/768;H01L23/52;(IPC1-7):H01L21/768;H01L21/320 主分类号 H01L21/3205
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