METHOD AND SYSTEM FOR TREATMENT OF STRIPPED PIECE OF RESIST

摘要

PROBLEM TO BE SOLVED: To provide a method and system for treatment of stripped pieces of resist which reduces danger during recovery of the stripped pieces of the resist and makes a contribution to cost effectiveness and environmental protectiveness by reducing the moisture content of wastes to <=1/5 that hitherto known. SOLUTION: A remover is acted on the object for cleaning stuck with the stripped pieces of the resist to be stripped to separate the stripped pieces and an acid is acted on the separated stripped pieces of the resist to lower the pH of the stripped pieces and to make the characteristic of the stripped pieces plastic and thereafter, the stripped pieces are transferred to the ensuring stroke. In acting the acid to the stripped pieces, the pH may be once lowered down to about <=6 and then the pH may be regulated to about 7 by subjecting the stripped pieces to dilution by rising. The action of the acid and the rising to the stripped pieces may be carried out in the same fixed vessel and the operation to pour the cleaning water after discharging of the treated water may be repeated a plurality of times. The moisture content may be lowered down to <=100% by acting the acid to the stripped pieces to lower the pH thereof and to make the characteristic plastic then subjecting the stripped pieces to dewatering.