| 摘要 |
PROBLEM TO BE SOLVED: To provide a discharge vessel having an excimer filler including at least one kind of rare gas and halogen for forming excimer together under an operation condition of a gap, an electrode, and a lamp, and manufactured from quartz glass. SOLUTION: In this discharge vessel, an inner wall of the discharge vessel is completely covered with an inactivation layer of oxide formed of at least one of metallic Al, Hf, Y or Sc, and in that case, the layer has an amorphous structure, and the thickness of the whole layer is 20 to 500 nm. Thus, even if a highly offensive filler is used, the superior discharge vessel having the long service life can be obtained. |
