发明名称 SEMICONDUCTOR DEVICE AND PRODUCTION METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device and a production method therefor with which the processes of high productivity can be provided, controllability in gate length line width is improved and an effective gate length is extremely fine. SOLUTION: A gate formation layer (undoped GaAs) having a step 15 is formed on a channel layer (n-type GaAs) 13, the step 15 is positioned between a source electrode 21 and a drain electrode 22, a channel layer 13 and an opposite conductivity type diffusion region (p-type GaAs) 17a are formed on a sidewall 15a of the step 15, and a gate electrode 20 is connected to that diffusion region 17a.
申请公布号 JP2003059943(A) 申请公布日期 2003.02.28
申请号 JP20010246620 申请日期 2001.08.15
申请人 SONY CORP 发明人 KOBAYASHI JUNICHIRO
分类号 H01L29/808;H01L21/337;H01L21/338;H01L29/778;H01L29/812;(IPC1-7):H01L21/337 主分类号 H01L29/808
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