| 摘要 |
PROBLEM TO BE SOLVED: To provide an observation system of an electronic microscope with which the highly reliable measured result can be provided by operating an electronic microscope such as scanning electronic microscope away from the installation place of it. SOLUTION: On the stage of visual field search, a client 11 can observe a scanning electronic microscope image to be changed with the passage of time by a terminal 6. In the case of visual field search, the client 11 can more speedily find out the target view by reporting the moving direction of a sample or the like through a video conference system to an operator 4 while observing the moving image of the sample. When the target view is found out and the visual field is determined, the operator 4 controls the scanning electronic microscope so that a sharp image can be obtained. After the control is completed, the operator 4 fetches the image of the determined view and transfers it through a remote control line 8 to a personal computer terminal 9 inside a control room 5 as digital data.
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