| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a grinding apparatus having a mechanism which can properly select an attracting region, corresponding to the size of a grinding object for carrying out the grinding object. SOLUTION: This grinding apparatus has a chunk table, which can properly attract and hold grinding objects having different diameters, a grinding means which grinds the grinding object attracted and held by the chuck table, and a grinding object carry-out mechanism 40 which can attract, hold, and carry out the grinding object ground on the chuck table. The grinding object carry-out mechanism 40 has an attraction pad 44, having a plurality of attracting regions which have different diameters and are formed concentrically and an attracting means 50, which applies negative pressure to the plurality of attracting regions, and corresponding to the diameter of the grinding object, negative pressure is selectively applied to one of the plurality of attracting regions of the attraction pad 44.</p> |
