发明名称 SEMICONDUCTOR DEVICE, RADIATION DETECTING DEVICE AND PHOTO DETECTOR
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device, a radiation detecting device and a photo detector in which insulating property of an insulating film is maintained when film thickness is increased. SOLUTION: In the semiconductor device, a first wiring 17 and a second wiring 16 formed on a substrate are mutually insulated and intersected, and an end portion of the first wiring 17 is inclined. Film thickness of the first 17 in a region except the inclined portion is Tg. Film thickness of a layer for insulating the first wiring 17 from the second wiring 16 is Ti. An inclination angle of the first wiring 17 isθg . A dielectric breakdown voltage which causes dielectric breakdown in the intersecting portion is V. The following relation is satisfied; V>C.Ti /Tg .1/cos<2> (90 deg.-θg ) where 75>=C>=65.
申请公布号 JP2003060029(A) 申请公布日期 2003.02.28
申请号 JP20010240904 申请日期 2001.08.08
申请人 CANON INC 发明人 WATANABE MINORU
分类号 G01T1/20;G01T1/24;H01L21/768;H01L23/522;H01L27/14;H01L27/146;H01L29/786;H01L31/09;(IPC1-7):H01L21/768 主分类号 G01T1/20
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