| 摘要 |
PROBLEM TO BE SOLVED: To provide a uniform ferroelectric thin film having good crystallinity. SOLUTION: A method for manufacturing a ferroelectric thin film comprises the steps of forming a seed layer containing an ultra-fine particle powder which contains a constituting element of the ferroelectric thin film, on the surface of a substrate for constituting a substrate prior to a formation of the ferroelectric thin film, forming the ferroelectric thin film on an upper surface of the seed layer, and crystallizing the thin film with the seed layer as a nucleus. |
