| 摘要 |
PROBLEM TO BE SOLVED: To provide a chemical treatment device comprising a processing- chemical nozzle, without increasing dispersion of air convolution, flowing down position, and range, and reducing the intensity of an impact shock impact against an object to be processed by relaxing flow rate of the treat chemical which flows down. SOLUTION: A developing solution nozzle 101, included in a developing machine has a discharge exhaust 102 composed of a plurality of small holes, opening downward at the bottom of the nozzle 101 facing a resist coated surface 2a and a spherical body 103 in the lower neighborhood of the discharging exhaust 102. The spherical body 103 comprises a streamlined connection section 104, extending from the bottom of the nozzle 101 and widening downward; an approximately spherical central part 105; a tapered and streamlined top end 106, and the developing solution 6 exhausted from the discharging exhaust 102 flows along the surface of the spherical body, and gathers and bundles slowly into a laminar flow to the tapered and streamlined top end 106, to drop on the resist coated surface 2a. |
