| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion supply device which makes the charged particle continuously hit a target, and makes the target attract and absorb the charged particles as many as possible, and makes the target continuously act (absorb) the charged particle forming substance. SOLUTION: The ion supply device comprises a charged particle (ion) generating means 2 emitting charged particles 1 against a target 3, and an electric potential keeping means 4 keeping the electric potential of the target 3 in order to make the target 3 continuously attract/absorb the charged particles 1.
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