发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device in which wiring capacitance is reduced, and a manufacturing method for a semiconductor device in which the number of manufacturing processes is small. SOLUTION: The semiconductor device has a semiconductor substrate 1, a first interlayer insulating film 2 formed in the substrate, a first wiring layer 3 formed in the interlayer insulating film, a first insulating layer 4 covering the first wiring layer and the interlayer insulating film, a second layer insulating film 6 covering the first insulating layer, an organic photosensitive film 7 covering the second interlayer insulating film, a second wiring layer 8 formed on the photosensitive film, a third interlayer insulating film 9 formed on a second wiring layer side surface and the photosensitive film, a conductive via 5 which penetrates the first insulating layer, the second interlayer insulating film and the photosensitive film and connects the first wiring layer with the second wiring layer, and a second insulating film 10 formed on the third interlayer insulating film and the second wiring layer.
申请公布号 JP2003060027(A) 申请公布日期 2003.02.28
申请号 JP20010249937 申请日期 2001.08.21
申请人 TOSHIBA CORP 发明人 YAMADA SHUKI
分类号 H01L21/768;(IPC1-7):H01L21/768 主分类号 H01L21/768
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