| 摘要 |
PROBLEM TO BE SOLVED: To provide a discharge plasma treatment apparatus which has a plurality of discharge spaces, can avoid overlapped device facilities, and can generate a discharge plasma independently in each discharge space. SOLUTION: In the discharge plasma treatment apparatus, three or more opposing electrodes having at least one opposing surface of the counter electrodes covered with solid dielectric are used to apply an electric field to the region between the electrodes having two or more discharge spaces, and to generate a discharge plasma. Application ones of the plurality of electrodes are connected to a single power supply. |
