DEVICE AND METHOD FOR IRRADIATING LASER AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide laser irradiation method/device, with which the energy distribution of laser beams on an irradiating face is made uniform in lasers having high coherence, and to provide a method for manufacturing a semiconductor device, using a semiconductor film obtained by crystallizing the semiconductor film and activating an impurity element. SOLUTION: The laser irradiating device is constituted of multiple lasers, a means for controlling the oscillation of the multiple lasers, a means for composing the multiple laser beams emitted from the multiple lasers into one laser beam, a means for converging the laser beams on the irradiating face or near the face and a means for moving the laser beam to at least one direction. The semiconductor film is irradiated with the laser beam by using the laser irradiating device, the semiconductor film can be crystallized and the impurity element can be activated.