| 摘要 |
PROBLEM TO BE SOLVED: To improve treating capability at least on a part of an exchanging operation of a substrate. SOLUTION: A carry-away arm 52 is driven in the Y-axis direction by an arm driving mechanism 56 and is moved to a substrate transfer position. Subsequently, at least a part of the carry-away arm 52 is inserted between recessed groves 31a and 31b formed on a stage WST. Thus, the stage WST is moved to the substrate passing position. Then, the movement of the stage to the substrate transfer position is completed, and in a state in which the carry-away arm is inserted in the recessed grooves, the carry-away arm and a holder 18 are relatively driven in the Z-axis direction, and the substrate is separated from the holder via the carry-away arm. In this way, the substrate is passed from the holder to the carry-away arm by moving the stage moving at high speed to the substrate passing position, inserting the part of the carry-away arm into the recessed grooves of the stage, relatively moving the carry-away arm and the holder in the Z-axis direction, and separating the substrate from the holder. |
